2004-01

disco

MAINTENANCE MANUAL

Fully Automatic Dicing Saw

DFD6351 DFD6361

SOFTWARE VERSION 1.6 SERIES

Copyright of this document is owned by Disco Corporation ("Disco"). No part of this document may be copied or reproduced in any form or by any means, without the express written permission of Disco. Also, this document may not be disclosed or transferred to third parties.

This document is printed on recyclable Lint-Free Paper.

• The blue paper is recyclable as used paper just like plain paper.

• The cover paper and adhesive portions are non-recyclable. (Remove the cover and adhesive portions before recycling. Recycle the blue paper only.)

UKFSME*016C

READ CAREFULLY BEFORE USING THIS MANUAL

Introduction

This machine is a dicing saw to cut materials such as silicon wafers and glass substrates (referred collectively as "workpiece" hereafter). The machine contains rotary sections with parts that operate at high speed; high-voltage sections with danger of causing electric shock; drive sections where the workers' physical parts and/or clothing may get caught. If N2 gas is used in placed of clean air, the machine also has a N2 gas ejection section that might have adverse effect on the human body. Failure to handle this machine properly may lead to serious injury or death.

Read before using the machine

Before using the machine, read this manual thoroughly and follow strictly all the instructions set forth in this manual.

To assure safety during work associated to operation and maintenance of this machine, it is important for every worker to know where the potential safety hazards lie in this machine. Although it is difficult for Disco to foresee each and every potential safety hazard, various precautionary notes and warnings have been included in this manual and the separate Safety Manual to identify and provide preventive knowledge against all foreseeable hazards. Strict observance of all these precautions and other relevant instructions set forth in this manual and the separate Safety Manual is thus essential for increased safety assurance.

The safety features of the machine may be seriously affected, in case this machine is modified without gaining the prior consent from Disco or repaired in a manner not stated in this manual.

Therefore, never attempt to modify or repair this machine in a manner not approved by Disco.

Extent of responsibility

• Disco is not responsible for any accident due to any of the following events.

  • When equipment of another manufacturer is added to the machine

  • When the machine or part of the machine is transported, reused, resold or modified

  • When supplied parts or parts designed by users are mounted on the machine

• It is possible that we are not able to carry out repair or maintenance work for reasons of safety and health care of our service or repair personnel, if the machine user refuses to disclose the names and contents of processing materials being used and/or processing piping, for reasons of confidentiality or trade secret protection.

Hazard level

The safety precautions set forth in this document are classified into DANGER, WARNING and CAUTION categories which represent three degree of hazards latent in the machine. These categories are defined as detailed below in accordance with the seriousness and probability level of the hazard. In addition to the above three safety precaution levels, CAUTION without the safety alert symbol ( ) and NOTICE are used to give safety usage instructions to the user.

Before using the machine, be sure to read and understand all the associated safety precautions set forth in the manual.

Hazard levels are classified as follows:

DANGER	If you cannot avoid the incident in question,a critical situation in which either critical injury or death is very likely to result . This symbol is used for the incident in which the injury is critical and there is highprobabilityof occurrence.
WARNING	If you cannot avoid the incident in question,a serious situation in which either critical injury or death may result . This symbol is used for the incident in which the injury is serious but there is not high probability of occurrence.
	If you cannot avoid the incident in question,a medium
CAUTION	or slight injury may result . This symbol is used for the incident in which the injury is slight and there is not highprobabilityof occurrence.
CAUTION	If you cannot avoid the incident in question,an accident of property damage may occur .
NOTICE	Indicatesthe safe way of using the machine as well as precautions to avoid accidents resulting in damage to property .

Safety label

Safety labels are affixed to the potentially hazardous sections of this machine. Before using this machine, verify the label positions and thoroughly understand the precautions and warning indicated by the safety labels.

Label	Hazard Level	Meaningof Label
Rotary Blade Label WARNING	WARNING	It is possible that your hands and fingers may be cut by the rotating blade. Observe the following precautions for at least 15 seconds until the spindle comes to a complete stop: - Do not place your hands or fingers near the blade or flange. - Ensure that the cover is kept closed.
Spinner Label CAUTION	CAUTION	It is possible that your hands and fingers may be cut by the rotating spinner or that serious injury may be caused by scattered workpiece. While the power is ON, do not position your hands or fingers near the spinner.
Driving Section Label CAUTION	CAUTION	It is possible that yours hands and fingers may be caught and injured by the driving section. While the power is ON, ensure that the cover is kept closed.
Electrical Shock Hazard Label	WARNING	Use care to avoid possible electrical shock hazard.
General Label	WARNING	General caution/warning/danger label.

INTRODUCTION

About this manual

This Maintenance Manual explains the maintenance and inspection items and data setup checkout that are necessary for customer-side maintenance, for maintenance personnel. The machine covered in the manual is the Disco Fully Automatic Dicing Saw 6000 Series Models DFD6351 and DFD6361.

To ensure safety

In order to ensure safety, be sure to thoroughly read and fully understand the important safety information set forth in the separate Safety Manual, before performing any operation.

Note that this manual is based on the software of version 1.6 series.

When doing maintenance, be sure to follow the procedures set forth in this manual.

Be sure that the maintenance should be performed by a qualified person who has completed DISCO's education curriculum (hereinafter referred to as the maintenance personnel).

Definition of a manager and an operator

The definition of "manager" and "personnel" applied in this manual is as follows:

Category	Applicable Personnel	Job
Manager	Management representative	The person who is responsible for overall management of machines and operators.
	Maintenance personnel	The qualified person who received DISCO machine maintenance training.
Operator	Data maintenance personnel	The qualified person who is responsible for management of software data of the machine.
	Operator	The person who operates the machine to process workpieces.

Minimum retention period of the maintenance functional parts

Maintenance functional parts required for repair or modification will be retained by Disco for at least seven years after the B/L date.

Unit notation

International System of Unit is adopted to express any unit. The values in the parenthesis are reference data. Also, all the pressure values are expressed in gauge pressure.

Intro-1

Part replacement

For parts replacement, be sure to use genuine Disco brand parts. If any parts that are not of genuine Disco brand are used for replacement, Disco shall assume no liability for any damages caused by these parts. For replacement of components that use parts accredited as UL Standards products, be sure to replace them respectively to new components that use UL Standards products.

For replacement of critical parts, be sure to contact your nearest Disco office first for prior consultation. If any critical parts are replaced without consulting Disco beforehand, Disco shall assume no liability for any consequences arising therefrom.

Part warranty period

Part warranty period is as follows:

Part	WarrantyPeriod
Electricalparts havingcontactpoints	Six months from the B/L date
Consumableparts	Not covered
Parts other than the above	12 months from the B/L date

Documentation for this machine

The following six written manuals are provided for 6000 series machine. This manual is the Maintenance Manual indicated by the arrow.

Manual	Who should read	Contents
Safety Manual	- Management representative - Data maintenance personnel - Maintenance personnel	Information for ensuring safety during machine operation, installation and maintenance
Installation Manual	Maintenance personnel	Procedures for machine installation and adjustment
Operation Manual	Operator	Operational procedures to be performed byoperators
Data Maintenance Manual	Data maintenance personnel	Screen contents for data entry and data setting procedures
Maintenance Manual	Maintenance personnel	Servicing, inspection and adjustment procedures to be performed bycustomers
Technical Reference	Maintenance personnel	Machine specifications/circuit diagrams Illustrations Part lists

Intro-2

CONTENTS

READ CAREFULLY BEFORE USING THIS MANUAL
INTRODUCTION................................................Intro-1
CONTENTS.................................................Contents-1
A. MACHINE COMPONENTS AND
FUNCTIONS .......................................................A-1
1. Machine Outer Cover ............................................................................. A-2
2. Axis Section............................................................................................ A-7
2-1. Axis Arrangement ............................................................................................. A-9
2-2. X-axis Section ................................................................................................ A-11
2-3. Y (Y1 and Y2)-axis Section............................................................................. A-13
2-4. Z (Z1 and Z2)-axis Section............................................................................. A-16
2-5.θ-axis Section................................................................................................. A-18
2-6. Spinner Section .............................................................................................. A-21
2-7. Elevator Section ............................................................................................. A-23
2-8. Pre-alignment Section .................................................................................... A-28
2-9. Transport Section ........................................................................................... A-30
2-10. Microscope Section ...................................................................................... A-32
2-11. Spindle-axis Section ..................................................................................... A-35
3. Main Body Section ............................................................................... A-38
4. Detection Function ............................................................................... A-45
4-1. Personnel Protection ...................................................................................... A-46
4-1-1. Safety switch/lock cylinder of the splash cover ..................................... A-47
4-1-2. Safety switch/lock cylinder of the arm section cover............................. A-48
4-2. Machine Protection......................................................................................... A-49
4-2-1. Air pressure sensor............................................................................... A-51
4-2-2. Flow rate sensor ................................................................................... A-52

Contents-1

CONTENTS
4-2-3. Vacuum pressure sensor ...................................................................... A-54
4-2-4. Sensor for clean air and deionized water.............................................. A-56
B. ADJUSTMENT OPERATION ..............................B-1
1. Chuck Table Replacement...................................................................... B-2
1-1. Removing the chuck table ................................................................................ B-4
1-2. Mounting the chuck table.................................................................................. B-7
2. Flange/Hub Mount Replacement............................................................ B-9
2-1. Flange Replacement (1.2 kW Spindle)........................................................... B-11
2-1-1. Removing the flange (1.2 kW spindle) .................................................. B-14
2-1-2. Mounting the flange (1.2 kW spindle).................................................... B-18
2-2. Hub Mount Replacement (1.2 kW Spindle)..................................................... B-24
2-2-1. Removing the hub mount (1.2 kW spindle)........................................... B-27
2-2-2. Mounting the hub mount (1.2 kW spindle) ............................................ B-31
2-3. Flange Replacement (1.8 kW Spindle)........................................................... B-38
2-3-1. Removing the flange (1.8 kW spindle) .................................................. B-41
2-3-2. Mounting the flange (1.8 kW spindle).................................................... B-45
2-4. Hub Mount Replacement (1.8 kW Spindle)..................................................... B-51
2-4-1. Removing the hub mount (1.8 kW spindle)........................................... B-54
2-4-2. Mounting the hub mount (1.8 kW spindle) ............................................ B-58
2-5. Flange Replacement (2.2 kW Spindle)........................................................... B-64
2-5-1. Removing the flange (2.2 kW spindle) .................................................. B-67
2-5-2. Mounting the flange (2.2 kW spindle).................................................... B-71
2-6. Hub Mount Replacement (2.2 kW Spindle)..................................................... B-77
2-6-1. Removing the hub mount (2.2 kW spindle)........................................... B-80
2-6-2. Mounting the hub mount (2.2 kW spindle) ............................................ B-84
3. Changing the Frame Size..................................................................... B-90
3-1. Calling up the CHANGE FRAME SIZE Screen [Screen 6.1] .......................... B-91
3-2. Changing the Lower Arm Size........................................................................ B-93
3-3. Changing the Upper Arm Size........................................................................ B-95
3-4. Replacing the Spinner Table........................................................................... B-96
3-4-1. Removing the spinner table .................................................................. B-97
3-4-2. Mounting the spinner table.................................................................... B-99
3-5. Changing the Frame Clamp Size ................................................................. B-100
3-6. Completion of Frame Size Change .............................................................. B-102

Contents-2

CONTENTS

3-7. Changing the UV Irradiation Unit Frame Size [Optional Accessory] ............. B-103
3-7-1. Shutting off power............................................................................... B-104
3-7-2. Removing the inspection plate............................................................ B-105
3-7-3. Changing the frame size ..................................................................... B-108
3-7-4. Completion of the frame size change.................................................. B-110
4. Sensor Adjustment .............................................................................. B-111
4-1. Pressure Sensor........................................................................................... B-112
4-1-1. Initial setting........................................................................................ B-113
4-1-2. Pressure setting.................................................................................. B-117
4-1-3. Zero clearance.................................................................................... B-121
4-2. Air Pressure Sensor Adjustment................................................................... B-122
4-2-1. Adjusting the air pressure sensor........................................................ B-123
4-2-2. Checking operation of the air pressure sensor.................................... B-125
4-3. Setting a Monitor Value of Clean Air Pressure.............................................. B-128
4-4. Setting a Monitor Value of Deionized Water Pressure.................................. B-131
4-5. Setting a Monitor Value of Vacuum Pressure ............................................... B-134
5. Adjusting Utilities for Spinner Atomizing Nozzle
[Optional Accessory]............................................................................B-137
C. ENGINEERING MAINTENANCE
OPERATIONS.....................................................C-1
1. Calling up ENGINEERING MAINTENANCE Screen [Screen 7.0] .......... C-3
2. Hub Mount/Flange Conditioning ............................................................. C-5
2-1. Movement in Conditioning................................................................................C-6
2-1-1. Flange conditioning.................................................................................C-7
2-1-2. Hub mount conditioning ..........................................................................C-8
2-2. Executing Conditioning.....................................................................................C-9
2-2-1. Replacing the chuck table..................................................................... C-11
2-2-2. Verifying FLANGE DRESSING screen data..........................................C-12
2-2-3. Executing conditioning..........................................................................C-15
2-2-4. Checking the end face accuracy...........................................................C-19
2-2-5. Completion of conditioning....................................................................C-21
3. Axis Operation Check........................................................................... C-22

Contents-3

CONTENTS

4. Sensor/Solenoid Valve Check .............................................................. C-27
4-1. I/O Check .......................................................................................................C-28
4-2. Axis Sensor Check .........................................................................................C-38
5. Customizing Setting ............................................................................. C-42
5-1. Setting on USER DEFINE DATA Screen [Screen 7.4]....................................C-43
6. Device Data Maintenance .................................................................... C-50
6-1. Deleting Device Data......................................................................................C-51
6-2. Moving Device Data .......................................................................................C-52
6-3. Deleting Directories ........................................................................................C-54
6-4. Renaming Directories.....................................................................................C-56
6-5. Changing Values of Device Data....................................................................C-57
7. Maintenance Scheduler........................................................................ C-64
7-1. Calling up the MAINTENANCE SCHEDULER Screen ...................................C-65
7-2. Updating LAST MENT DATE..........................................................................C-68
7-3. Changing DAYS SET......................................................................................C-69
7-4. Changing the Maintenance ITEM...................................................................C-70
7-5. Deleting the Maintenance ITEM .....................................................................C-71
8. Maker Data........................................................................................... C-72
9. SECS/GEM Setup [User-Specified Specification] ................................. C-73
D. TROUBLESHOOTING........................................D-1
1. Remedies for Problems Invoking No Error Code Indication - Problems at Power ON - ...................................................................... D-2
1-1. Main Circuit Breaker Problems.........................................................................D-3
1-2. Main Power Supply Problems ..........................................................................D-4
1-3. POWER Lamp (Power-On Lamp) Problems ....................................................D-6
1-4. Touch Panel Problems......................................................................................D-7
1-5. Microscope Light Source Problems................................................................D-10
1-6. EMO Switch Problems.................................................................................... D-11
2. Remedies for Problems Invoking Error Code Indication ....................... D-12
2-1. Error Code Classification................................................................................D-13

Contents-4